Microelectromechanical structure for sensing of low frequency sounds and vibrations

The sensing of low frequency sounds and vibrations as well as converting their energy to electric current is a frequently recurring problem, as most of the sounds and vibrations found in our environment is characterized like this. The project proposes a solution in the form of a Microelectromechanical Structure (MEMS) whose fundamental frequency is around 200-300Hz, resonating with a high amplitude in the relevant frequency range, and therefore the mechanical energy stored as strain can be converted to electric current using a piezoelectric layer. My application of this was in cochlear implants, therefore our device is optimized for this use case, in size as well as in the parameters of the signal.

Scientific field





Péter Udvardi

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